B T S
Broad Tech System, Inc.
Provide Equipment & Engineering Service to Semiconductor Industry
www.broadtechsystem.com





We have extensive semiconductor spare parts inventory. We offer new
OEM spare parts & surplus parts for semiconductor equipments including:

- AMAT 8110, 8330    
Check Parts List

- P5000, Endura5500, Centura 5200 Check Parts List

- ASM E2 & E2000 Reactor  Check Parts List

- ASML PAS5500

- Canon Mask Aligners : Canon PLA-501F,PLA-501FA, PLA-600F  

- Canon Stepper: FPA-3000i4/i5/iW, FPA-2500i3, FPA-2500i2,
FPA-2000i1,FPA-1550Mk4W, MPA500/600

- CHA Mark50

- Canon Anelva-ILD-4003

- Eaton and Varian Ion Implanter: Varian 350D,CF3000, 300XP
Eaton NV10-160, NV1-80, NV6200A/AV. Varian E1000, E500
AMAT9200, 9500, Axcelis GSD's, 8250

- FSI Mercury MP & Mercury OC

- Gasonic Aura 1000, 3010    (we also carry A95-070-01 Transformer)

- KLA-Tencor SFS-4500/5500, SFS-6XXX

- Lam 490, 590, 4420, 4520,4620,4720, 9400, 9600

- Matrix 102,105, 303,403

- Nikon Stepper                                              

- Novellus CVD & PVD concept 1 and concept 2

- Perkin Elmer 4400/4500

- Solitec

- SVG8600,8800 series                      

- Semitool 4" 240/440/840, 5" 260/460/860, 6" 270/470/870,
8" 280/480/880, 12" 2300/4300/8300   (121R001-501 Door Seal)

- Tegal 901e, 903e, 6500

-Thermco TMX Series Furnaces 4100,4300, 4700, 4900. 5100. 5200
Series

- Ultratech Stepper: 900,  1000, 1100, 1500

- Verteg 1600 & 1800 Series    (1064788.1 Door Seal)

- Varian3180,3190,3290                    

- Veeco RF350

- WaferMarkII



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Spare Parts Line Card
P: 909-923-2666
F: 909-923-2699
sales@broadtechsystem.com

Ontario, CA 91761 USA
Looking for parts ? Please contact us : sales@broadtechsystem.com
© Copyright 2007 Broad Tech System Inc. - All rights reserved.